Denton Discovery 24

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Denton Discovery 24

General Information

Equipment Name: Denton Discovery 24 Sputtering System

Location: 358 ERC

Max Wafer Size: 6”

 

System Information

General Description: The Denton Discovery 24 Sputtering System can deposit a wide range of metals, dielectrics, optical coatings, and protective layers.

Capabilities:

  • Load lock has automated electric cassette elevator with positive sense of wafer position and occupancy for 8-position cassettes.
  • Four 3” diameter internal planar magnetron sputter sources with RF/DC capability, variable source to substrate distance, and clamp/bond target capability.
  • Dressler Cesar 136 RF power supply (600 watt output), coupled to a Dressler Variomatch VM700A automatic match network.
  • Two Advanced Energy MDX1.5K kW (1.5 kW) DC power supply.
  • ENI RPG-50 (5.0 kW) pulsed power supply
  • RF stage biased with a Dressler Cesar 136 RF power supply (600 watt output) coupled to a Dressler Variomatch VM700A automatic match network.
  • Substrate heater with a 800C maximum.
  • Process gases are Argon, Oxygen, and Nitrogen.
  • A wide variety of different sized substrates can be mounted to a 6” silicon wafer.

 

Denton Discovery 24 Sputter Targets

 

Material Thickness Purity   Quantity
Ag .125" 99.999%   1
Al2O3 .125" 99.99%   2
AlNi 30% .125" 99.5%   1
AlNi 50% .125" 99.5%   1
AlSi 2% .250" 99.999%   1
Aluminum .250" 99.999%   1
Ba.5Sr.5TiOx .125" 99.5%   1
Boron .125" 99.9%   1
Carbon .125" 99.999%   1
Chromium .250" 99.98%   1
Chromium .125" 99.95%   1
Cobalt .020" 99.95%   4
CoFe 19% .020" 99.95%   3
CoFe9B19 .125" 99.9%   1
Copper .250" 99.9%   1
Germanium Sb doped .250" 99.999%   1
Hafnium .250" 99.9%   1
In2O3/SnO2 10% .125" 99.99%   1
Iron .020" 99.95%   2
Iron .062" 99.95%   1
La.5Sr.5CoOx .125" 99.5%   1
LaAl .125" 99.9%   1
LaNi .125" 99.9%   2
Lanthanum .250" 99.8%   1
MgO .125" 99.9%   1
Molybdenum .250" 99.9%   1
Nickel .250" 99.999%   1
Nickel .040" 99.99%   4
Nickel .040" 99.97%   1
Nickel .040" 99.9%   1
NiFe .020" 99.95%   1
NiFe 20% .020" 99.95%   1
Niobium .250" 99.95%   1
NiTi 50% .125" 99.9%   1
Pb1.1Zr.2Ti.8O .125" 99.9%   1
Pb1.1Zr.52Ti.48O .125" 99.9%   2
Rhenium .100" 99.99%   1
Ruthenium .125" 99.95%   3
Silicon .250" 99.999%   1
SrSnO3 .125" 99.5%   1
SrTiO .125" 99.9%   1
Tantalum .250" 99.9%   1
TiN .125" 99.9%   1
Tungsten .125" 99.9%   1
Tungsten .250" 99.95%   1
Tungsten carbide 50% .125" 99.9%   1
Zinc .25" 99.999%   1
ZnO .125" 99.995%   1
Zirconium .25" 99.999%   1
ZrO2 .125" 99.9%   1

 

Useful System Links


Equipment Use Fees

Internal:  first metal ($40), second metal ($20 + 1st metal), third metal ($15 + 2nd metal), fourth metal ($10 + 3rd metal) plus material cost (most metals $3/100 Å and gold $25/100 Å)

External: first metal ($80), second metal ($40 + 1st metal), third metal ($30 + 2nd metal), fourth metal ($20 + 3rd metal) plus material cost (most metals $6/100 Å and gold $30/100 Å). 
Staff time: $80/hour

Schedule Training 

Documentation

Operators Manual

SOP