Clean Room

Micromanipulator 6200 Manual Probe Station

Micromanipulator 6200 Manual Probe Station

Micromanipulator 6200 Manual Probe Station

General Information

Equipment Name: Micromanipulator 6200 Manual Probe Station

Location: 361 ERC

Max Wafer Size: 4”

 

System Information

General Description: The 6200 probe station is design for precise stage movement of substrates and probes for ease of use in everyday failure analysis, device characterization, process monitoring, and reliability testing applications.

Capabilities:

  • Stage has a 4” vacuum chuck with movement in X, Y, Z, and theta directions
  • Heated 4” chuck
  • Five vacuum probes are available with X, Y, Z, and Theta movement
  • Bausch and Lomb Microzoom II optics with X and Y movement, 1 to 2X zoom, objectives are 2.25X, 8X, and 25X with long working distances
  • Vibration isolation table
  • Computer controlled instruments uses LabVIEW 2010 and a GPIB card for data gathering

 

Useful System Links


Equipment Use Fees

Internal $10/hour External $20/hour
Staff time: Internal: $40/hour External: $80/hour

Schedule Training 

Documentation

Operators Manual

SOP