Equipment Name: Suss RCD8 Gen 3 Spin Coater
Max Wafer Size: 2” - 8” round or 2” – 6” square
General Description: The RCD8 is a basic manual spin coater with the GYRSET® technology serving daily R&D work up to small scale production. The patented GYRSET® rotating closed cover coating technology is integrated into the RCD8 spin coating module. For various photoresists and applications, the GYRSET® technology enables a wider process window. During the process the cover is closed creating a solvent saturated atmosphere. All of the substrate dependent parts, including the air, are locked into the cover and rotate synchronously. This ensures that any turbulence is ruled out and the coating is distributed evenly across the surface of the substrate. The control software is SUSS MMC Tool Control software based on Windows XP. The touchscreen GUI (Graphical User Interface) monitors performance and status of the entire machine.
- Manual substrate handling and centering.
- Maximum number of process steps is 60.
- Open bowl coating – maximum spin speed is 6000 RPM and spin acceleration of 1 – 6000 RPM/second. Programmable increments of 1 RPM.
- GYRSET coating – maximum spin speed is 3000 RPM and spin acceleration of 1 – 3000 RPM/sec. Programmable increments of 1 RPM.
Useful System Links
Equipment Use Fees
Internal $10/hour External $30/hour
Staff time: Internal: $40/hour External: $80/hour