Equipment Name: KLA Tencor P-15 Profilometer
Location: 361 ERC
Max Wafer Size: 8”
General Description: The KLA-Tencor P-15 Profiler is a highly sensitive surface profiler that measures step height, roughness, and waviness on sample surfaces. Roughness can be measured with up to a 0.5 Å resolution over short distances. Waviness can be measured over the entire surface of a sample. The P-15 system uses stylus-based scanning to achieve high resolution and can correlate local submicron features with global surface measurements. It has a scan area of 200 X 200 mm.
- Microscopic and Macroscopic Feature Resolution: Combines macroscopic and microscopic surface analysis, and measures features as small as 0.25 μm.
- Correlation Scanning: Provides a data reference for comparing the measurements of multiple microscopic features by re-scanning portions of a macroscopic long scan on the microscopic scale.
- Die Grid Navigation: Offers an alternative method to that of positioning the sample by XY coordinates. Instead, it selects die location for measuring lithographic patterns in different dies.
- 3D imaging.
Acceptable substrate materials are flat metal, glass, paper, plastics, ceramic, and semiconductors.
Useful System Links
Equipment Use Fees
Internal $30/hour External $60/hour
Staff time: $80/hour