Alessi REL-3200 Manual Probe Station

Alessi REL-3200 Manual Probe Station

Alessi REL-3200 Manual Probe Station

General Information

Equipment Name: Alessi REL-3200 Manual Probe Station

Location: 361 ERC

Max Wafer Size: 6”


System Information

General Description: The REL-3200 probe station is design for precise stage movement of substrates and probes for ease of use in everyday failure analysis, device characterization, process monitoring, and reliability testing applications.


  • Stage has a 6” vacuum chuck with movement in X, Y, Z, and theta directions
  • Heated 6” chuck
  • Probe card adapter for 48 pin edge cards
  • Six magnetic probes are available with X, Y, Z, and Theta movement.  Z direction has 100 threads/inch capabilities for fine adjustment. Seven and 25 micron diameter probe tips for fine and course probing
  • Mitutoyo FS60 optics with X and Y course/fine movement, 1 to 2X zoom, objectives 2X, 10X, and 20X with long working distances
  • Light tight enclosure
  • Computer controlled instruments uses LabVIEW 2010 and a GPIB card for data gathering


Useful System Links

Equipment Use Fees

Internal $10/hour External $20/hour
Staff time: Internal: $40/hour External: $80/hour

Schedule Training 


Operators Manual