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Engineering Research Center Cleanroom

The Engineering Research Center Cleanroom is a central fabrication, processing, and characterization center intended to be used by a diverse campus wide research community. The more than 8000 square foot facility includes areas of class 10, 100, 1000, and 10,000 cleanroom spaces. It includes lithography, deposition, etching, oxidation, and electrical and optical characterization tools, some of which are featured above. 

The ERC Cleanroom is a University facility that encourages use from all colleges and departments on campus as well as other academic and industrial users. To gain access to the facility one needs to complete the ERC Cleanroom safety course as well as the OSHA online Hazardous Communications training courses. The completion of these and possessing appropriate personnel protective equipment will allow access to the laboratory facility. Additional training is required to use a majority of the facility equipment.

Location

Contact Us

Director

Headshot of Chong H. Ahn

Chong H. Ahn

Professor, CEAS - Elec Eng & Computer Science

900 Rhodes Hall

513-556-4767

Assistant Director

Headshot of Rashmi Jha

Rashmi Jha

Professor, CEAS - Elec Eng & Computer Science

385 Engineering Research Cntr

513-556-1361

Dr. Rashmi Jha is Professor in Electrical Engineering and Computer Science Department at the University of Cincinnati. She was an Associate Professor at the University of Cincinnati from 2015-2020. She worked as an Assistant Professor and then Associate Professor in Electrical Engineering and Computer Science Department at the University of Toledo from 2008 to 2015. Before this, she worked as a Process Integration Engineer for 45 nm/32 nm High-k/Metal Gates based Advanced CMOS technology at Semiconductor Research and Development Center, IBM, East Fishkill New York between 2006-2008. She finished her Ph.D. and M.S. in Electrical Engineering from North Carolina State University in 2006 and 2003, respectively, and B.Tech. in Electrical Engineering from Indian Institute of Technology (IIT) Kharagpur, India in 2000. She has more than 18 years of experience in the areas of Solid State Electronics and Nanoelectronic Device Design, Modeling, Fabrication, Process Integration, Electrical Characterization, Data Analysis, Circuit Design and Simulations.  She has been granted 13 US patents and has authored/co-authored several publications in the areas of computing devices, circuits, and algorithms. She has been a recipient of AFOSR Summer Faculty Fellowship Award in 2017, CAREER Award from the National Science Foundation in 2013, IBM Faculty Award in 2012, IBM Invention Achievement Award in 2007, Materials Research Society's Graduate Student Award in 2006, Applied Materials Fellowship Award in 2005-2006, and the best student paper award nomination in IEEE International Electron Devices Meeting (IEDM) in 2005. Her current research interests span all the way from devices to systems and algorithms. Particularly, she is interested in Artificial Intelligence (AI), Low-Power Neuromorphic Systems, CMOS and other emerging logic and memory devices ( such as Resistive Random Access Memory Devices, Spintronics, and other memristive devices), On-die sensors, Cross-Technology Heterogenous Integration and Modeling, Cybersecurity with emphasis on Hardware Security, Additive, Flexible, and Wearable Electronics, Nanoelectronics, Neuroscience and Neuroelectronics, Bio-Inspired Computing and Systems.
 
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Ronald Flenniken

Microelectronics Engineer, CEAS - Clean Room

388 Engineering Research Cntr

513-556-4796

Headshot of Jeffrey R. Simkins

Jeffrey R. Simkins

Microelectronics Engineer, CEAS - Clean Room

390 Engineering Research Cntr

513-556-4775