Two people working in the Cleanroom

Mantei Center Cleanroom

The Mantei Center Cleanroom is a central fabrication, processing, and characterization center intended to be used by a diverse campus-wide research community. The more than 8000 square foot facility includes areas of class 10, 100, 1000, and 10,000 cleanroom spaces. It includes lithography, deposition, etching, oxidation, and electrical and optical characterization tools, some of which are featured above. 

The Cleanroom is a university facility that encourages use from all colleges and departments on campus as well as other academic and industrial users. To gain access to the facility one needs to complete the ERC Cleanroom safety course as well as the OSHA online Hazardous Communications training courses. The completion of these and possessing appropriate personnel protective equipment will allow access to the laboratory facility. Additional training is required to use a majority of the facility equipment.


Cleanroom & OCMI Equipment

UC Mantei Center Cleanroom for Micro/Nano Fabrication is a central fabrication, processing, and characterization center intended to be used by a diverse campus wide-research community and industry. The more than 8,000 square foot facility includes areas of class 10, 100, 1000, and 10,000 clean room spaces. It includes lithography, metal and dielectric deposition, etching, oxidation, and optical and electrical characterization tools. 

To sign up to use the equipment in the Cleanroom and OCMI, please fill out the Equipment Usage Scheduler

View the full list of available equipment


Location


Cleanroom Request Forms


Contact Us

Director

Headshot of Rashmi Jha

Rashmi Jha

Professor, CEAS - Electrical and Computer Engineeri

385 MANTEI

513-556-1361

Dr. Rashmi Jha is Professor in Electrical Engineering and Computer Science Department at the University of Cincinnati. She was an Associate Professor at the University of Cincinnati from 2015-2020. She worked as an Assistant Professor and then Associate Professor in Electrical Engineering and Computer Science Department at the University of Toledo from 2008 to 2015. Before this, she worked as a Process Integration Engineer for 45 nm/32 nm High-k/Metal Gates based Advanced CMOS technology at Semiconductor Research and Development Center, IBM, East Fishkill New York between 2006-2008. She finished her Ph.D. and M.S. in Electrical Engineering from North Carolina State University in 2006 and 2003, respectively, and B.Tech. in Electrical Engineering from Indian Institute of Technology (IIT) Kharagpur, India in 2000. She has more than 18 years of experience in the areas of Solid State Electronics and Nanoelectronic Device Design, Modeling, Fabrication, Process Integration, Electrical Characterization, Data Analysis, Circuit Design and Simulations.  She has been granted 13 US patents and has authored/co-authored several publications in the areas of computing devices, circuits, and algorithms. She has been a recipient of AFOSR Summer Faculty Fellowship Award in 2017, CAREER Award from the National Science Foundation in 2013, IBM Faculty Award in 2012, IBM Invention Achievement Award in 2007, Materials Research Society's Graduate Student Award in 2006, Applied Materials Fellowship Award in 2005-2006, and the best student paper award nomination in IEEE International Electron Devices Meeting (IEDM) in 2005. Her current research interests span all the way from devices to systems and algorithms. Particularly, she is interested in Artificial Intelligence (AI), Low-Power Neuromorphic Systems, CMOS and other emerging logic and memory devices ( such as Resistive Random Access Memory Devices, Spintronics, and other memristive devices), On-die sensors, Cross-Technology Heterogenous Integration and Modeling, Cybersecurity with emphasis on Hardware Security, Additive, Flexible, and Wearable Electronics, Nanoelectronics, Neuroscience and Neuroelectronics, Bio-Inspired Computing and Systems.
 

Staff

Headshot of Ronald Flenniken

Ronald Flenniken

Clean Room Engineer Sr, CEAS - Clean Room

388 MANTEI

513-556-4796

Headshot of Jeffrey R. Simkins

Jeffrey R. Simkins

Microelectronics Engineer, CEAS - Clean Room

390 MANTEI

513-556-4775

Headshot of Je Hyeong Bahk

Je Hyeong Bahk

Associate Professor, CEAS - Mechanical Eng

490 Rhodes Hall

513-556-4608

Dr. Je-Hyeong Bahk is currently associate professor jointly at the Department of Mechanical and Materials Engineering, and the Department of Electrical and Computer Engineering at the University of Cincinnati, OH, USA, Dr. Bahk has worked in the field of thermoelectrics for more than 10 years since his Ph.D study at University of California, Santa Barbara. He has participated in various research projects on design and fabrication of efficient nanotechnology-based thermoelectric materials and devices, and also developed several online simulation tools on nanoHUB.org capable of thermoelectric devices and materials simulation for research and education.  

Group Web: https://sites.google.com/site/jhbahk/
Google Scholar: https://scholar.google.com/citations?hl=en&user=x-cZE5YAAAAJ
ResearchGate: https://www.researchgate.net/profile/Je-Hyeong-Bahk 
Headshot of Marc M Cahay

Marc M Cahay

Professor, Department Head, CEAS - Electrical and Computer Engineeri

812J Rhodes Hall

513-556-4754

M. Cahay has thirty seven years experience in the field of nanoscience and nanotechnology and vacuum micro- and nano-electronics. He has published over 150 refereed journal papers and 60 refereed conference proceedings papers. He is an active member of the Electrochemical Society (ECS) for which he has co-edited of 11 proceedings volumes of symposia on quantum confinement and cold cathodes. He has been on the board of the IEEE Technical Committee on Spintronics and Nanomagnetism since 2002, has served on the program committees of 30 international conferences. He has written a book on an Introduction to Spintronics with Prof. Bandyopadhyay from Virginia Commonwealth University. His current area of research deals with generation of spin polarized currents by purely electrical means using asymmetrically bias quantum point contacts with in-plane side gates, experimental and theoretical investigations of field emission from carbon nanotube fibers and second electron emission from various anode materials. He is also looking into lasing from hybrid plasmonic Zn-doped GaAs nanowires up to room temperature with Prof. Hans-Peter Wagner in the Physics Department at UC. He is also conducting research on quaternions and their applications in quantum mechanics in collaboration with Dennis Morris.
                                                         
Headshot of Leyla Esfandiari

Leyla Esfandiari

Assoc Professor, CEAS - Biomedical Eng

MANTEI

513-556-1355

Dr. Esfandiari is a distinguished associate professor of Biomedical Engineering at the University of Cincinnati and a faculty member of Cincinnati Children’s Hospital Medical Center’s Stem Cell and Organoid Medicine (CuSTOM) program. She is highly regarded for her work in developing miniaturized technologies for biomedical applications. Her research is mainly focused on developing micro- and nano-scale devices, such as sensors and actuators, that can be applied in liquid biopsy and regenerative medicine. Her research has been supported by the National Institute of Health (NIH), the National Science Foundation (NSF), and the Department of Defense (DoD). Dr. Esfandiari has won many awards, including the NIH Maximizing Investigator Research Award (MIRA), the NSF CAREER Award, the Engineering and Applied Sciences Distinguished Research Award, and the Restemeyer Teaching Excellent Award.
Dr. Esfandiari received her B.S. in Electrical Engineering from the California State University of Long Beach (CSULB) and her M.Sc. in Biomedical Engineering from the University of California Irvine (UCI). She completed her doctoral degree in Bioengineering from the University of California Los Angeles (UCLA). While at UCLA, Esfandiari also conducted research at the California Nano-System Institution (CNSI), School of Medicine Neuroscience and Orthopedic Surgery Departments. During her academic training, Dr. Esfandiari has given back by leading and training graduate and undergraduate students. Besides her academic experiences, she has 3 years of industrial experience working at the tech companies in southern California.
Headshot of Frank M Gerner

Frank M Gerner

Professor, Senior Associate Dean, CEAS - Administration

816 MANTEI

513-556-2646

Headshot of Ryan J White

Ryan J White

Professor and Ohio Eminent Scholar, Unit Head - Chemistry, A&S College of Arts and Sciences

ARTSCI

513-556-4369

My research and teaching interests lie at the intersection of nanoscience, electrochemistry and the biological interface. The research interests in our group focus on the development of new (bio)analytical methods to probe chemical and biological systems with unprecedented spatial and temporal resolutions afforded by working at the nanoscale. The scope of this research is quite broad, ranging from studies of fundamental chemical and biological phenomena to the development of applied sensor technologies. As such, students in the group can expect to gain valuable interdisciplinary laboratory experience.
 
Ryan J. White is Professor and Ohio Eminent Scholar in the Department of Chemistry with a complimenrary joint appointment in the Department of Electrical and Computer Engineering. He has served as Head of Chemistry since Fall 2022. Ryan received his bachelor’s degree in chemistry from the University of North Carolina (2003) and earned a Ph.D. in chemistry from the University of Utah (2007). He was an NIH NRSA Postdoctoral Fellow at the University of California Santa Barbara. Ryan started his academic career as an assistant professor in Chemistry and Biochemistry at UMBC in 2011, and was promoted to associate professor with tenure in 2016. Ryan joined UC in the fall of 2017. Ryan is also the recipient of the Royce W. Murray Young Investigator Award from the Society for Electroanalytical Chemistry.