The Engineering Research Center Cleanroom is a central fabrication, processing, and characterization center intended to be used by a diverse campus wide research community. The more than 8000 square foot facility includes areas of class 10, 100, 1000, and 10,000 cleanroom spaces. It includes lithography, deposition, etching, oxidation, and electrical and optical characterization tools, some of which are featured above.
The ERC Cleanroom is a University facility that encourages use from all colleges and departments on campus as well as other academic and industrial users. To gain access to the facility one needs to complete the ERC Cleanroom safety course as well as the OSHA online Hazardous Communications training courses. The completion of these and possessing appropriate personnel protective equipment will allow access to the laboratory facility. Additional training is required to use a majority of the facility equipment.