The Engineering Research Center Clean Room is a central fabrication, processing, and characterization center intended to be used by a diverse campus wide research community. The more than 8000 square foot facility includes areas of class 10, 100, 1000, and 10,000 clean room spaces. It includes lithography, deposition, etching, oxidation, diffusion, and characterization tools, some of which are featured above. The newest arrival to the facility is the Plasmatherm Versaline ICP tool that enables researchers to selectively etch sub 100 nm features for nano-scale device fabrication.
The ERC Clean Room is a University facility that encourages use from all colleges and departments on campus as well as other academic and industrial users. To gain access to the facility one needs to complete the ERC Clean Room safety course as well as the OSHA online Hazardous Communications training courses. The completion of these and possessing appropriate personnel protective equipment will allow access to the laboratory facility. Additional training is required to use a majority of the facility equipment.